High-Purity Quartz Wafer Carriers Become Core Consumables for Vacuum Furnaces-Amy
2026/07/10
High-purity quartz wafer carriers (quartz boats) are essential fixtures inside semiconductor vacuum furnaces for annealing, LPCVD, oxidation and diffusion processes.
Made of 99.995% fused silica, they feature ultra-low metal impurities to avoid wafer contamination under high vacuum. With ultra-low thermal expansion and full stress-relief annealing, the carriers stay dimensionally stable under repeated 1000–1200℃ thermal cycles, resisting thermal shock and deformation.
Chemically inert to fluorine, acidic and carrier gases, polished smooth surfaces reduce particle shedding and chip scratches. Precision grooving keeps wafers evenly spaced for uniform heat and gas flow, stabilizing film thickness and electrical performance.
Custom sizes for 4/6/8/12-inch wafers are available to match horizontal & vertical vacuum tube furnaces. Domestic quartz carriers match imported quality with shorter lead times and lower costs, supporting mass production of chips, solar cells and optoelectronic materials.
